Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors - ScienceDirect
Investigation of the TiN/photoresist interface degradation during a wet etch - ScienceDirect
Dry etching of TiN in N2/Cl2/Ar adaptively coupled plasma - ScienceDirect
Wet Etchant for DRAM Word-line Titanium Nitride Recess with Selectivity to Tungsten
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Etch rate of Co 2 MnSi thin films and TiN hard mask (a), and the etch... | Download Scientific Diagram
Dry-etching properties of TiN for metal/high-k gate stack using BCl3-based inductively coupled plasma: Journal of Vacuum Science & Technology A: Vol 27, No 6
Thermal Atomic Layer Etching of Titanium Nitride Using Sequential, Self-Limiting Reactions: Oxidation to TiO2 and Fluorination t
How to Etch a Candy Tin (With Photos) - FeltMagnet
Etching characteristics of TiN used as hard mask in dielectric etch process: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena: Vol 24, No 5
Selective isotropic wet etching of TiN and TaN for high k metal gate structure
The Dry Etching of TiN Thin Films Using Inductively Coupled CF4/Ar Plasma
Figure 1 from Selective wet-etching of filtered arc deposited TiN films on Cr sacrificial layers | Semantic Scholar
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6.4.1 Etching Techniques
Thermal Atomic Layer Etching of Titanium Nitride Using Sequential, Self-Limiting Reactions: Oxidation to TiO2 and Fluorination to Volatile TiF4 | Chemistry of Materials
Selective etching of TiN over TaN and vice versa in chlorine-containing plasmas
How to Etch a Candy Tin (With Photos) - FeltMagnet
Etch rate of TiN thin films for the variation of coil rf power (a) and... | Download Scientific Diagram
Etch rate of TiN thin films and photoresist for the variation of Cl 2 gas | Download Scientific Diagram
Selective dry etching of TiN nanostructures over SiO2 nanotrenches using a Cl2/Ar/N2 inductively coupled plasma
Thermal gas-phase etching of titanium nitride (TiN) by thionyl chloride (SOCl2) - ScienceDirect
TiN hard mask pattern after mask open etch. A stack consisting of 150... | Download Scientific Diagram
